The micro-focus X-ray Measurement System (XMS) uses a fine focal spot x-ray source in combination with discreet detectors to precisely measure spacing between features in electronic assemblies.  This non-imaging, precision metrology system is used in custom quality control systems.  The XMS software contains considerable archiving and SPC charting capabilities.

The XMS is comprised of an x-ray source, high sensitivity discreet detector, and a precision translation mechanism. The measurement geometry is in a through-transmission configuration. The micro-focus x-ray source generates a point source of x-ray energy. The sample is positioned close to the source while the detector is located remote from the source. Both the x-ray source and the detector are stationary and the sample, which is mounted on a precision linear stage, is translated through the beam. The x-ray intensity at the detector is recorded as a function of sample position. The current XMS system is operated at a fixed linear translation speed of 2 inch/second.  The system is capable of measuring samples as small as 0.5” in width and as wide as 16” with a precision of +/- 0.0001”. System magnification is approximately 60X. The system collects x-ray intensity data every 0.1 microns (0.0000025 inches) of linear stage movement. The system automatically determines the dimensions and compares measurement results to the specifications contained in the sample record. All data is archived.