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As magnetic thin-film systems have
become part of complex applications in the electronic industry, their
composition has increasingly become more complicated. Thus, a means is
needed to efficiently develop and systematically characterize the
magnetic, electronic, and mechanical properties of these advanced
thin-film systems. In particular, new metrological systems capable of
making on-wafer measurements on a large number of sites over a large
region of parameter space are needed.
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In this program we conceived and
conducted design experiments on a prototype system, MOMMS. The
prototype is comprised of a novel wafer scanning system, innovative
magnet design, and integrated software package for automated, on-wafer
measurements of thin films. The prototype system is designed to measure
magnetic property data on film libraries deposited on 76-millimeter
diameter wafers with “book” dimensions as small as 1.5 by 1.5
millimeters. The sensor package available on the prototype includes
magneto-optic Kerr effect (MOKE) probe, magneto-resistance probes, Hall
Effect probes and a new, non-contact probe for magnetostriction based on
surface acoustic wave measurements. The system is designed such that
multiple sensor data can be acquired on each site of a combinatorial
film library. This unique system is essential to keep pace with
combinatorial library deposition methods and is expected to speed the
discovery and development of improved magnetic thin-films. |
